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Semiconductor

     Brochures
  • SPM systems and actuators for in situ TEM [pdf-120kB]
• STM-TEM        [pdf-124kB]
• TEM-AFM        [pdf-121kB]
• TEM-NanoIndenter [pdf-123kB]
• Japanese - SPM systems and actuators for in situ TEM [pdf-329kB]


     Application notes
  • Nanofactory Instruments related research – list of abstracts
• mechanics of silicon nanorelays [AN3-139kB]
• electrical probing of InAs nanowhiskers [AN4-50kB]
• Si nanowires mechanical properties [AN7-145kB]
• conductance of carbon nanotubes [AN8-122kB]
• EELS characterization [AN10-460kB]


    Pictures and videos
  Image Gallery Semiconductor


Nanofactory sells dedicated TEM holders and control electronics for in situ probing of electrical and mechanical properties of nanostructures:

• single-tilt and double tilt TEM holders for electrical and force nanoprobing
• TEM-Nanoindenter systems for in situ nanoindentation
• scanning STM-TEM and TEM-AFM nanoprobing systems


Benefits

The key benefits of TEM in situ probing techniques lie in the abilities to
• locate and align a probe to nanoscale objects with high precision
• characterize both object and probe by high resolution imaging using TEM
• carry out electrical and mechanical probing in situ
• study dynamical processes


Selected applications

Nanowires, nanotubes, nanoparticles, semiconductor devices and nanostructures, electro-mechanical testing, nanomechanics, electromigration, high current/fields, failure, hardness.


Selected articles

Heterojunctions between metals and carbon nanotubes as ultimate nanocontacts – PNAS vol 106 p4591–4595 (2009), J.A. Rodrνguez-Manzo, F. Banhart, M. Terrones, H. Terrones, N. Grobert, P.M. Ajayan, B.G. Sumpter, V. Meunier, M. Wang, Y. Bando, and D. Golberg.

A high-density array of size-controlled silicon nanodots in a silicon oxide nanowire by electron-stimulated oxygen expulsion – Nano Lett. 9 p1780–1786 (2009), G.-S. Park, E. K. Lee, J. H. Lee, J. Park, S. K. Kim, X. S. Li, J. C. Park, J. G. Chung, W. S. Jeon, S. Heo, J. H. Lee, B. L. Choi and J. M. Kim.

Quantitative evaluation of plasticity of a ductile nano-component – Thin Solid Films 516 p1925–1930 (2008), Y. Takahashi, H. Hirakata, T. Kitamura.

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